Product description
4. Pocket design, greatly reducing the times of filling;
Suitable for evaporation or doping of refractory metals, such as tantalum, molybdenum and tungsten;
With beam monitoring module, the beam stability can be maintained for a long time;
Parameter
Type of heating wire: doped tungsten wire;
Heating wire emission current: 300 Ma;
Bar bias: 2 kV;
Bar diameter: 6 mm;
Bar feeding length: 50 mm;
Bar temperature: 3500 ℃;
Length in vacuum: 290 mm;
Mounting flange: DN40CF;
Baking temperature: 250 ℃;
Built in water cooling;
Built in manual baffle;
Steamable material
Metallic materials, especially refractory metals, such as Ta, Mo, w